Foamtec UltraSOLV® ScrubPAD 280 Diamond Grit - 100 Pads/Case - HT4528D-10

ScrubPADS® from Foamtec International are specialized abrasive pads designed for precision cleaning within semiconductor manufacturing environments, such as wafer fabs. These pads are essential for the maintenance and cleaning of various types of semiconductor process equipment, including CVD, PECVD, dry etch, PVD, and ion implant tools.

Versatility in Grit Options: ScrubPADS® are available in a range of abrasives, including diamond, silicon carbide, and aluminum oxide, which allows for tailored cleaning actions depending on the surface material and the type of residue.

Reduction in Particle Contamination: These pads are engineered to minimize particle generation during cleaning, which is crucial in maintaining the integrity of sensitive equipment and processes.

Efficient Cleaning: The design of ScrubPADS® ensures quick and thorough removal of residues, reducing both the cleaning time and downtime of equipment.

Safe for Various Surfaces: The pads can be safely used on a variety of materials found in semiconductor tools, including aluminum, stainless steel, ceramic, glass, quartz, and anodized surfaces, without risking damage to these surfaces.

Low Ionic Residue: The abrasives are washed to reduce harmful ionic residues, ensuring that the cleaning process does not introduce new contaminants.

Grit: 280 Diamond Grit

Packaging:

10 ScrubPADS/Pack, 10 Packs/Case - 100 ScrubPADS Total