• Key performance benefit: Foamtec UltraSOLV ScrubPADs are engineered for precision cleaning, ensuring quick and thorough residue removal. This efficiency reduces cleaning time and equipment downtime, optimizing semiconductor manufacturing processes.
  • Material & construction: Constructed with 360 diamond grit, these pads offer robust abrasive action. The diamond grit provides durability and consistent performance across various cleaning tasks.
  • Risk reduction/compliance benefit: Designed to minimize particle generation, these pads help maintain the integrity of sensitive semiconductor equipment, crucial for compliance with industry cleanliness standards.
  • Protection level: The pads are safe for use on aluminum, stainless steel, ceramic, glass, quartz, and anodized surfaces, preventing damage during cleaning operations.
  • Comfort & usability: The ScrubPADs are easy to handle and use, providing effective cleaning without introducing new contaminants, thanks to their low ionic residue.
  • Safety & compliance assurance: California Prop 65 warning ensures users are informed of potential chemical exposure, maintaining compliance with safety regulations.

Recommended For

  • Wafer fabrication cleaning
  • CVD equipment maintenance
  • PECVD tool cleaning
  • Dry etch process equipment
  • PVD system upkeep
  • Ion implant tool maintenance

Available Variants

  • Foamtec UltraSOLV® ScrubPAD 360 Diamond Grit - 100 Pads/Case - HT4536D-10 (SKU: HT4536D-10)
  • Foamtec UltraSOLV® ScrubPAD 360 Diamond Grit with Slits - 100 Pads/Case - HT4536DS-10 (SKU: HT4536DS-10)

Primary Industries

  • Semiconductor manufacturing
  • Electronics fabrication
  • Precision engineering
  • Cleanroom maintenance

Standards and Certifications

  • California Prop 65 Warning

Product Details

  • Grit: 360 Diamond Grit
  • Packaging: 10 ScrubPADS/Pack, 10 Packs/Case - 100 ScrubPADS Total
  • Safe for surfaces: Aluminum, stainless steel, ceramic, glass, quartz, anodized
  • Low Ionic Residue: Yes
  • Particle Contamination Reduction: Yes

FAQs