• Key performance benefit: Foamtec UltraSOLV ScrubPADs are engineered to ensure precision cleaning in semiconductor manufacturing. The 1350 diamond grit effectively removes residues from equipment, enhancing operational efficiency and reducing downtime.
  • Material & construction: Constructed with high-quality diamond grit, these pads provide robust abrasive action. The durable design ensures longevity and consistent performance across various semiconductor processes.
  • Risk reduction / compliance benefit: Designed to minimize particle generation, these pads help maintain the integrity of sensitive semiconductor equipment, crucial for compliance with industry cleanliness standards.
  • Protection level: The pads are safe for use on materials such as aluminum, stainless steel, ceramic, and glass. They ensure thorough cleaning without damaging delicate surfaces.
  • Comfort & usability: The compact size and efficient design of the ScrubPADs make them easy to handle, allowing for quick and effective cleaning operations in high-precision environments.
  • Safety & compliance assurance: The pads are washed to reduce ionic residues, ensuring that no new contaminants are introduced during the cleaning process, supporting compliance with cleanliness protocols.

Recommended For

  • CVD equipment cleaning
  • PECVD tool maintenance
  • Dry etch process cleaning
  • PVD equipment upkeep
  • Ion implant tool cleaning
  • Semiconductor wafer fabs
  • Anodized surface cleaning
  • Quartz and glass maintenance

Available Variants

  • Foamtec UltraSOLV ScrubPAD 1350 Diamond Grit - 100 Pads/Case - HT4513PD-10 (SKU: HT4513PD-10)
  • Foamtec UltraSOLV ScrubPAD 1350 Diamond Grit with Slits - 100 Pads/Case - HT4513PDS-10 (SKU: HT4513PDS-10)

Primary Industries

  • Semiconductor manufacturing
  • Electronics fabrication
  • Precision engineering
  • Cleanroom maintenance
  • High-tech equipment manufacturing

Standards and Certifications

  • California Prop 65 Warning

Product Details

  • Product Title: Foamtec UltraSOLV ScrubPAD 1350 Diamond Grit - 100 Pads/Case - HT4513PD-10
  • Grit: 1350 Diamond Grit
  • Packaging: 10 ScrubPADS/Pack, 10 Packs/Case - 100 ScrubPADS Total
  • Safe for Surfaces: Aluminum, stainless steel, ceramic, glass, quartz, anodized
  • Low Ionic Residue: Yes
  • SKU: HT4513PD-10

FAQs